JPH0542612B2 - - Google Patents

Info

Publication number
JPH0542612B2
JPH0542612B2 JP59064189A JP6418984A JPH0542612B2 JP H0542612 B2 JPH0542612 B2 JP H0542612B2 JP 59064189 A JP59064189 A JP 59064189A JP 6418984 A JP6418984 A JP 6418984A JP H0542612 B2 JPH0542612 B2 JP H0542612B2
Authority
JP
Japan
Prior art keywords
pressure
gauge
resistance
coefficient
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59064189A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60205329A (ja
Inventor
Toshio Aga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP6418984A priority Critical patent/JPS60205329A/ja
Publication of JPS60205329A publication Critical patent/JPS60205329A/ja
Publication of JPH0542612B2 publication Critical patent/JPH0542612B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP6418984A 1984-03-30 1984-03-30 圧力センサ Granted JPS60205329A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6418984A JPS60205329A (ja) 1984-03-30 1984-03-30 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6418984A JPS60205329A (ja) 1984-03-30 1984-03-30 圧力センサ

Publications (2)

Publication Number Publication Date
JPS60205329A JPS60205329A (ja) 1985-10-16
JPH0542612B2 true JPH0542612B2 (en]) 1993-06-29

Family

ID=13250859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6418984A Granted JPS60205329A (ja) 1984-03-30 1984-03-30 圧力センサ

Country Status (1)

Country Link
JP (1) JPS60205329A (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53125879A (en) * 1977-04-08 1978-11-02 Toyoda Chuo Kenkyusho Kk Pressure converter
JPS5941134B2 (ja) * 1980-04-15 1984-10-04 富士電機株式会社 圧力変換器

Also Published As

Publication number Publication date
JPS60205329A (ja) 1985-10-16

Similar Documents

Publication Publication Date Title
KR100741520B1 (ko) 다이어프램을 갖는 반도체 압력 센서
US5259248A (en) Integrated multisensor and static and differential pressure transmitter and plant system using the integrated multisensor
KR900004369B1 (ko) 반도체 변형게이지 브리지회로
US4480478A (en) Pressure sensor employing semiconductor strain gauge
JPH0777266B2 (ja) 半導体歪み検出装置
JP2882786B1 (ja) センサの信号処理回路
JPH0542612B2 (en])
JPH0542610B2 (en])
JPH0542611B2 (en])
JPH0542607B2 (en])
JPS6222272B2 (en])
JPH0455542B2 (en])
JPH0542609B2 (en])
JPH0542608B2 (en])
JP3140033B2 (ja) 半導体装置
JPS60171416A (ja) 抵抗式変換装置
JPH042170A (ja) 半導体拡散抵抗形圧力センサにおけるスパン電圧温度補償方法
JPS61224367A (ja) 半導体圧力センサ
JPH0476046B2 (en])
JPH0313537B2 (en])
JPH0476047B2 (en])
JP2002039888A (ja) 半導体圧力センサのゲージ抵抗の位置設定方法
JPS6255629B2 (en])
JPH0814521B2 (ja) 半導体圧力センサの温度補償方法
JPH0526775Y2 (en])